The MAS6512 from Micro Analog Systems Oy, Helsinki, Finland, is a 16-bit capacitive sensor signal interface IC primarily intended for MEMS-based pressure sensor modules. The device consumes 1.9 µA, operates from a 1.8–3.6 V supply voltage, and uses a ratiometric ADC principle. The IC can interface both single and dual capacitance sensors and features an onchip temperature sensor, sensor offset and gain adjustment, a 5.8–82.6 ms (12–173 Hz) conversion time, a 16-bit ratiometric Delta Sigma capacitance-to-digital converter (CDC), and an internal 256-bit EEPROM calibration memory. Communication is via 2-wire I2C and 4-wire SPI.
Micro Analog Systems Oy