The Model μLF-100 ultrasonic liquid flowmeter from Flow Technology Inc., Tempe, AZ, can measure flow rates down to 94 ml/min. through a small-diameter PFA tube. Features include no moving parts, accuracy and repeatability to ±0.2%, no pressure drop, and the ability to use the unit on 3 and 6 mm line sizes. Applications include DI water and chemical solutions in the semiconductor market.
Micro Liquid Flowmeter from Flow Technology
Flow Technology Inc.