The MSF02 from Innovative Sensor Technology, Wattwil, Switzerland, and Las Vegas, NV, can measure the thermal mass flow of gases from 0.001–2 m/s (up to 50 m/s) and has a chip temperature range of –40°C to 150°C. The sensor uses thin-film technology to layer platinum micro heaters and temperature sensors on a thin polymer membrane. Customers can specify dimensions and resistor layouts to fit their applications. The sensor's design is suited for soldering, conductive gluing, or wire bonding. The sensor element can be mounted as an assembly on a PCB or other carrier and also can be mounted in a bypass flow assembly for differential pressure measurements.
Innovative Sensor Technology