Nova, provider of metrology solutions for advanced process control used in semiconductor manufacturing, unveils NOVAFit engine, a software application said to enhance traditional modelling capabilities with advanced machine learning algorithms. The software improves metrology capabilities and accelerates time to solution in complex 3D and High Aspect Ratio devices. Together with Nova's Fleet Management big data solution, NOVAFit™ utilizes fleet-wide information to provide adaptive advanced metrology solutions based on continuous training. The new suite of software capabilities will complement all of Nova's fleet and will work in conjunction with Nova's advanced modelling engine -NovaMARS. These new solutions were adopted by multiple customers and have begun to generate revenue.
The solution, which embeds the most advanced machine learning and big data architecture into optical modelling, revolutionizes the way customers utilize metrology measurement data and expands the metrology performance envelope to tighten process windows, avoid process excursions and improve yield. The platform was designed to interface with other process control tools for accuracy improvement and shorter training and control cycles. With this new significant supplement, NOVAFit, in conjunction with Nova's Fleet Management, is now connecting all of Nova's metrology fleet to one big data cluster, which applies smart algorithms to improve the measurements' accuracy and process feedback across multiple fabrication steps. This new approach enhances Nova's capability in measuring multiple parameters in a much more robust method and improves its competitive position.
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