Temperature Sensing Module Wants To Scratch An Etch

LumaSense Technologies’ m924 four-channel and m922 two-channel semiconductor OEM modules are designed for electrostatic chuck, chamber, and other device-temperature monitoring during etching and wafer-fabrication processes. The modules provide temperature monitoring up to +330°C. The m924 module has a sampling rate five times faster than most other modules or converters, and provides a ±0.1°C accuracy. 

The m920 Series Semiconductor OEM system is based on the LumaSense Luxtron brand of Fluoroptic probes and fiber optic extensions. This Fluoroptic sensing technology lends itself well to variation in probe construction and is easily customized for OEMs.


 

LumaSense Technologies, Inc.

SENSORS MIDWEST

Sensors Midwest Hits Rosemont, IL October 16-17!

Sensors Midwest, the industry's largest event focusing on sensors, design, and IIoT in the Midwest region, is scheduled for October 16-17 at the Donald E. Stephens Convention Center in Rosemont, IL. Co-located with STMA, the event draws over 1,000 engineers and engineering professionals that are looking for access to the latest sensor advancements and will provide an opportunity to connect with the area's greatest technology leaders and suppliers.

Santa Clara, CA

800-631-0176

[email protected]

http://www.lumasenseinc.com