Temperature Sensing Module Wants To Scratch An Etch

LumaSense Technologies’ m924 four-channel and m922 two-channel semiconductor OEM modules are designed for electrostatic chuck, chamber, and other device-temperature monitoring during etching and wafer-fabrication processes. The modules provide temperature monitoring up to +330°C. The m924 module has a sampling rate five times faster than most other modules or converters, and provides a ±0.1°C accuracy. 

The m920 Series Semiconductor OEM system is based on the LumaSense Luxtron brand of Fluoroptic probes and fiber optic extensions. This Fluoroptic sensing technology lends itself well to variation in probe construction and is easily customized for OEMs.


 

LumaSense Technologies, Inc.

EMBEDDED TECHNOLOGIES EXPO & CONFERENCE

The inaugural event will take place June 25-27 in San Jose, CA!

Embedded Technologies Expo & Conference (ETC), in the largest embedded and IoT market in North America, is the ONLY event focused on what is most important to designers and implementers – education and training. Attendees will experience over 100 hours of unparalleled education and training covering embedded systems, IoT, connectivity, edge computing, AI, machine learning, and more. Co-located with Sensors Expo & Conference, attendees will have the opportunity to see hundreds of leading exhibitors and network with thousands of industry peers and innovators.

Santa Clara, CA

800-631-0176

[email protected]

http://www.lumasenseinc.com

Suggested Articles

‘Smart’ bio-printed parts can help repair the human body.

Hall effect current sensor IC target 400A+ applications.

Free core and spring-loaded LVDT sensors meet the needs of industrial monitoring and feedback applications.