LumaSense Technologies’ m924 four-channel and m922 two-channel semiconductor OEM modules are designed for electrostatic chuck, chamber, and other device-temperature monitoring during etching and wafer-fabrication processes. The modules provide temperature monitoring up to +330°C. The m924 module has a sampling rate five times faster than most other modules or converters, and provides a ±0.1°C accuracy.
The m920 Series Semiconductor OEM system is based on the LumaSense Luxtron brand of Fluoroptic probes and fiber optic extensions. This Fluoroptic sensing technology lends itself well to variation in probe construction and is easily customized for OEMs.
LumaSense Technologies, Inc.
Santa Clara, CA