Non-Magnetic Actuators Relish Ultra-High Vacuum Environments

MKS Instruments claims its Newport New Focus 83xx-UHV-NM Series Picomotor actuators with Kapton wires are viable for use in ultra-high vacuum environments, beam steering, and other motion-control applications in vacuums down to 10 to 9 Torr, as well as in radiation applications where Kapton wiring is required. The actuators provide 0.5 in. (12.7 mm) or 1 in. (25.4 mm) of travel and are tailored for applications requiring low magnetic susceptibility and permeability such as e-beam lithography, particle acceleration, scientific MRI scanning, and non-magnetic OEM applications.


Other features include a better than 30-nm resolution with minimal backlash, high stiffness, and a load capacity of 22 N. Picomotor actuators will only move when voltage is applied to the piezo, meaning a user’s set-up will stay put with set-and-forget long-term stability even when the system is powered down.


For additional information and specs, a Newport 83xx-UHV-NM Picomotor Actuator product brief is available. For more details, contact MKS Instruments, Andover, MA. 978-645-5500 or [email protected]