The PMFc3000 family of MEMS mass airflow sensors from Posifa Microsystems Inc., San Jose, CA, covers the ranges from 30–1000 sccm and can be special ordered with any F.S. range between 10 and 2000 sccm. The fully calibrated sensors are compensated over the 0°C–50°C temperature range, use a solid-state thermal isolation process, and offer high reliability and an initial output tolerance of <2% F.S. The sensors are pin-compatible with the Honeywell AwM3000 series. The sensor die uses a pair of compound thermopiles surrounding a central heating element to detect changes in temperature gradient caused by mass flow. Internal signal conditioning circuitry leverages an off-the-shelf microcontroller.
Posifa Microsystems Inc.