Wireless Applications

KLA-Tencor Introduces the EtchTemp SensorWafer

April 16, 2009

The next-generation wafer temperature-measurement system has unique capabilities to characterize high-power, high-frequency etch recipes proliferating at 65 nm nodes and below.

MILPITAS, CA /BUSINESS WIRE/ -- KLA-Tencor Corp. released its next-generation in-situ plasma-etch wafer temperature-measurement product, the EtchTemp SensorWafer. The newest SensorWafer from KLA-Tencor's SensArray division, EtchTemp captures the effect of the process environment on production wafers and offers unique new capabilities to robustly characterize the high-power, high-frequency etch recipes proliferating at 65nm nodes and below.

The EtchTemp SensorWafer enables etch engineers to further visualize, diagnose, and control their processes and process tools, through the significantly increased process-measurement capabilities. Enhancements include:

  • Up to 7 kW total radio frequency (RF) power and RF immunity for use in any reactor

  • The ability to collect data without modification of process recipe or tool/robot settings

  • Enhanced spatial resolution, with 32 sensors within 10 mm of the wafer edge, and offering 60% increased radial coverage

"One of the key challenges for etch engineers today is matching chambers to achieve consistent performance across the entire toolset. Additionally, smaller processing windows make chamber matching difficult, and higher RF power recipes make it harder to achieve Cpk (process capability) goals," said Larry Wagner, Senior Vice President and General Manager SensArray Division. "With this new tool, etch engineers will have an accurate and reliable means for capturing critical etch process data, as well as the ability to characterize a full range of RF power and frequencies for all chambers currently on the market."

The EtchTemp SensorWafer, supported by the PlasmaSuite Software package, is designed specifically for chamber matching, post-PM qualification, troubleshooting, and process development. Key features for these applications include advanced RF shielding, enabling accurate temperature measurement at high RF powers, as well as all frequencies and reactor designs; 65 temperature sensors, allowing increased wafer-edge resolution; all electronics totally encased in silicon substrates, enabling thin 1.2 mm profile resolves tool clearance issues; and advanced manufacturing processes bringing increased reliability and durability.

With EtchTemp's highly accurate measurement of plasma etch temperatures, engineers will have access to previously unavailable data, gaining information on the dynamic response to diverse recipe steps, as well as chamber-to-chamber variations. The data captured by the EtchTemp can also be used by equipment engineers to qualify tools and ensure chamber health.

Currently, the EtchTemp is the "only product of its kind on the market today." The EtchTemp is already in production use at three major etch OEM vendors, as well as a major memory IDM company, with repeat orders being received from each of them.

For additional information or to arrange a press briefing, please contact Abby Lurie at 619-234-0345 or lurie@formulapr.com.

About KLA-Tencor
KLA-Tencor Corp., a leading provider of process control and yield management solutions, partners with customers around the world to develop the most advanced inspection and metrology technologies on the market. These technologies serve the semiconductor, data storage, compound semiconductor, photovoltaic, and other related nanoelectronics industries. With the "broadest portfolio of products and the world's foremost engineers and scientists," the company strives to create superior solutions for customers. Headquartered in Milpitas, CA, KLA-Tencor has dedicated customer operations and service centers around the world.

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