Sensors Author

Tom Adams

for Sonoscan Inc.

Tom Adams is a consultant for Sonoscan Inc., Elk Grove Village, IL. For more information, contact Sonoscan Inc., Automated Inspection Division at 847-437-6400 or

Acoustic Imaging of MEMS Wafers and Devices   September 1, 2012
By: Tom Adams

UHF ultrasound is a valuable tool for nondestructively evaluating the bonds and seals used in MEMS devices, identifying flaws and process problems at the wafer stage and facilitating process refinement.


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