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Grundfos Uses Proprietary Coating in Pressure Sensor Production

May 9, 2007

SUSS MicroTec's AltaSpray approach delivers consistent conformal coatings over various structures, such as 90 degree corners, KOH etched cavities, V-grooves, and lenses.

MUNICH, Germany /BUSINESS WIRE/ -- Grundfos, a full-line supplier of pump technology located in Denmark, has purchased, installed, and qualified a fully automated Gamma AltaSpray coating cluster from SUSS MicroTec for production of Grundfos pressure sensors, which are used in its high-quality pump solutions. With the AltaSpray approach, SUSS MicroTec, a leading manufacturer of precision equipment for the semiconductor and emerging markets, has developed a revolutionary spray-coating technology that delivers consistent conformal coatings over various structures, such as 90 degree corners, KOH etched cavities, V-grooves, or lenses. SUSS AltaSpray systems are capable of achieving uniform photoresist coatings on sidewall slopes from 0 to 90 degrees and even on re-entrant profiles.

"Grundfos is a leading pump manufacturer and produces its own range of pressure and flow sensors for the harsh environments, usually found in pump systems," said Grundfos officials. "Grundfos sensors help to optimize the performance and lower the energy consumption of the pumps and pump systems. For these applications, we were looking for advanced wafer-coating equipment that is able to meet our most demanding process requirements. We were impressed by the ability of the SUSS Spray Coater to reliably cover steep sidewalls and sharp topography edges found on our structures."

"With the AltaSpray technology, we have developed a dedicated technology for the fabrication of 3D microstructures that are especially used in the field of MEMS and advanced packaging," comments Rolf Wolf, General Manager, SUSS MicroTec' Lithography Division. "Since the launch of this technology three years ago, we have managed to implement AltaSpray as the tool of choice for high-topography applications. The order from Grundfos is a perfect example of SUSS AltaSpray technology being established in volume production."

About SUSS MicroTec
SUSS MicroTec is a leading supplier of production, process, and test technology for the semiconductor industry. SUSS maintains its leadership position with over 7000 systems installed worldwide. SUSS products include coating developing systems, 1X full-field lithography systems, substrate bonders, flip-chip bonders, and probe systems. Headquartered in Munich, Germany, SUSS has five international manufacturing sites and provides support from sales and service centers in North America, Europe, Asia, and Japan. For more information, please visit the company's Web site.

About Grundfos
The Grundfos Group develops, sells, and manufactures pumps. With some 15,000 staff members, the group is represented by sales and production companies in 41 countries. In 2006, Grundfos' revenue was DKK 15.4 billion. For more information, please visit the company's Web site.

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