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Analog Devices Introduces MEMS Inclinometer

October 22, 2007

The dual-mode device provides direct angle output with 0.1° linear inclination accuracy and is 100 times smaller than functionally equivalent inclinometer solutions.


Norwood, MA - Analog Devices, Inc. (NYSE: ADI), a global leader in high-performance semiconductors for signal processing applications, has introduced a highly integrated, dual-axis inclinometer that makes extremely accurate, easy-to-use tilt sensing an affordable and accessible option for industrial equipment manufacturers. The ADIS16209 programmable, dual-mode inclinometer sensor is suited to a diverse set of industrial applications that require inclination changes to be measured, including surveying equipment, factory machine tools, satellite antenna stabilization systems, motion safety monitors and automotive wheel alignment. Functionally equivalent inclinometer solutions are typically 100 times larger than the ADIS16209.

The industry's most precise MEMS (micro-electromechanical systems) inclinometer, the ADIS16209 provides a fully compensated direct angle output with <0.1° linear inclination error, making it at least twice as accurate as competitive tilt sensors. This is due to the addition of an embedded controller, which uses factory-installed calibration coefficients to dynamically sense the system environment and compensate the direct-digital angular output to account for changes in voltage, temperature, angle and other variables. Other MEMS-based tilt sensors typically require industrial engineers to perform additional external calibration and signal processing that adds time, cost and complexity to product design. ADI's MEMS-based inclinometer is also significantly smaller than alternative sensing technologies, especially bulky, fluid-filled electrolytic sensors, which can require special board mounting. As a result, the ADIS16209 affords designers the option to more easily integrate the new sensor precisely at the point of sensing interest.

"The ADIS16209 provides an accurate and simple bits-out angle in a standard semiconductor format," said Andy Garner, product line director for iSensor intelligent sensor products, Analog Devices. "This is a big departure from both electrolytic sensors and less integrated MEMS-based sensors. The on-chip dynamic compensation of the ADIS16209 is important for two reasons: it allows our customers to confidently absorb mid-stream system design changes without losing their time-to-market advantage; and it provides end users with equipment that delivers accurate sensing data that is resistant to in-field environmental changes that can often result in costly, cumbersome recalibration."

More About the ADIS16209 Inclinometer
The ADIS16209 dual-axis programmable inclinometer, based on an Analog Devices' iMEMS (integrated micro-electromechanical systems) core, is capable of measuring dual-axis tilt with <0.1° error across a ±30° range when mounted horizontally. Because of its unique dual-mode operation, the new sensor also supports a vertically mounted single-axis implementation, over a full 360° range. The tunable digital sensor data is output via an industry-standard SPI (serial peripheral interface) port, which provides access to inclination (0.025° resolution), acceleration (0.244 mg resolution), temperature and power supply. The ADIS16209 also features a 12-bit auxiliary ADC input and DAC output, digital self-test function and configurable condition monitoring, including alarms. The sensor operates on a single 3–3.6 V power supply and can withstand a 3500 g shock.

Pricing and Availability
The ADIS16209 dual-axis programmable inclinometer is sampling now in a 9.2 mm x 9.2 mm x 3.9 mm laminate-based LGA (land grid array) package. Production quantities will be available in November 2007. The ADIS16209 is priced at $34.40 per unit in 1,000-unit quantities.

Analog Devices in Industrial
Analog Devices has a more than 40-year heritage of working in concert with its industrial customers to define, develop and deploy complete signal chain solutions that are optimized for their applications. ADI's legacy of supporting the sector's long product life cycles with multiyear manufacturing commitments is augmented by the company's educated sales force, knowledgeable field applications engineers and advanced design support tools that include evaluation boards and SPICE models.

About Analog Devices
Innovation, performance, and excellence are the cultural pillars on which Analog Devices has built one of the longest standing, highest growth companies within the technology sector. Acknowledged industry-wide as the world leader in data conversion and signal conditioning technology, Analog Devices serves over 60,000 customers, representing virtually all types of electronic equipment. Celebrating over 40 years as a leading global manufacturer of high-performance integrated circuits used in analog and digital signal processing applications, Analog Devices is headquartered in Norwood, MA, with design and manufacturing facilities throughout the world. Analog Devices' common stock is listed on the New York Stock Exchange under the ticker "ADI" and is included in the S&P 500 Index.

iMEMS is a registered trademark of Analog Devices, Inc.


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