Jonathan BernsteinCorning-IntelliSense Corp.

Article
An Overview of MEMS Inertial Sensing Technology February 1, 2003
By: Jonathan Bernstein

MEMS-scale accelerometers, geophones, and gyros-thanks to their small size and weight, modest power consumption and cost, and high reliability-are replacing some of their standard-size precursors as well as establishing new markets of their own.

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