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Sensors Author

Jeffrey M. Melzak


Article
Silicon Carbide Microsensors for Demanding Applications   February 1, 2005
By: Chien-Hung Wu,Jeffrey M. Melzak

As MEMS sensors move into more extreme environments, the search for an alternative to silicon is on. Recent advances in processing make silicon carbide (SiC) a viable and attractive choice for harsh environment microsystems.