Gennadiy FrolovMicrobridge Technologies Canada

Article
A Microflow-Based Differential Pressure Sensor May 1, 2009
By: Gennadiy Frolov,Les Landsberger,Oleg Grudin

This article describes prototypes of a novel thermoanemometer-type nanoliter-airflow sensor, integrated onchip with analog CMOS signal conditioning circuitry and with analog adjustability that allows accurate sensing of low differential pressures.

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