Pieozresistive Pressure Sensors from Merit Sensor
Merit Sensor Systems
September 9, 2009
HM Series absolute pressure sensors from Merit Sensor Systems, South Jordan, UT, are for high-volume, low- and medium-pressure, harsh-media OEM applications. The sensors use a piezoresistive Wheatstone bridge design that anodically bonds glass to a chemically etched silicon diaphragm and are pressurized from the cavity side. Measuring range is 15 to 500 psi. Sensors can be used with air, gases, and liquids that are compatible with silicon and glass. Operating temperature range is –40°C to 150°C.
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