Optical Pen Handles High-Res Measurements
December 3, 2013
STIL’s latest optical pen, the CL0-MG210, is capable of performing high-resolution measurements from MEMs to microbumps and nano-roughness. The component specifies a depth of field of 70 µm, working distance of 2.6 mm, an NA of 0.67, axial resolution of 5 nm, and a lateral resolution of 0.9 µm. For further information, visit http://www.stilsa.com.
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