Optical Encoders for UHV from Renishaw
July 22, 2012
RESOLUTE UHV encoders from Renishaw Inc., Hoffman Estates, IL, are ultra-high-vacuum (UHV) compatible and offer true absolute position feedback, submicron accuracy, and resolutions to 1 nm for linear and rotary applications. The devices determine position on switch-on, for immediate axis control after power loss, and are constructed from clean vacuum-compatible materials and adhesives for use in semiconductor and scientific applications that require vacuum compatibility to 10–10 Torr. Features include an independent position-checking algorithm that checks every reading; pure serial communications with CRC; a single-track scale code; SS or ZeroMet linear scales with accuracy to better than ±1 µm on lengths up to 1.13 m; and serial protocols that include BiSS, FANUC, Mitsubishi, and Panasonic.
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