Miniature Optical Encoder from MicroE Systems
November 2, 2009
The Mercury II 5000 from MicroE Systems, Bedford, MA, is a miniature optical encoder that provides up to ±20 nm accuracy (cyclic error), programmable resolution, and ranges from 5 µm to 1.2 nm. The A-quad-B output provides up to 5 m/s at 0.1 µm resolution and max. speed of 10 m/s. The sensor is 11 mm high and all electronics are integrated in the sensor, including programmable interpolation. Alignment tolerances are ±2° (rotational, around Z axis) and ±0.15 mm ride height tolerance. Adhesive-mount PurePrecision tape scales include stick-on optical index and limits; index is bidirectional and provides 1 LSB repeatability at all speeds.
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