Instrumentation from ULVAC

Click for larger image
November 20, 2011

ULVAC Inc., Chigasaki, Japan, offers the SM2 multi-ionization gauge, the UNECS-3000A spectroscopic ellipsometer, and the VFR-400 and VFR-500 large pendulum valves for FPD manufacturing equipment. The ionization gauge is a separation-type wide-range vacuum gauge that can connect to three different types of vacuum gauges. The UNECS-3000A is an automatic, high-speed ellipsometer that can measure the thickness and optical constant distribution of a thin film, with an automatic mapping function that can measure 106 points over a 300 mm dia. substrate in 120 s. The vacuum gauges are 16 in. (VFR-400) and 20 in. (VFR-500) and do not use a mechanical lock mechanism.


CompanyULVAC Inc.
Phone+81 467-89-2261
Fax+81 467-89-2267




Twitter Feed

Find It Fix It Forum

Sensors invites you to join the Findit-Fixit Forum, where you can get answers to your sensing questions—concerning technologies, products, methods, applications, and services--and also offer help to your fellow engineers. The Forum covers all kinds of topics, from the basics to the extraordinary.

Join the discussion!

© Copyright 2016 Questex, LLC. All Rights Reserved. Sensorsmag. Privacy Policy | Terms of Use

If you are having technical difficulties or considerations, please contact the webmaster.