Gas Flow Ratio Controller from MKS Instruments
MKS Instruments Inc.
August 22, 2007
The Delta II from MKS Instruments Inc., Wilmington, MA, measures, divides, and controls user-specific ratios of mixed gas flows to multiple zones or chambers. Dynamic ratio control range is 20:1. Features include faster gas flow response for shorter cycle times and increased throughput, diagnostics accessible through an embedded Ethernet interface, and a digital control loop that maintains ratio control independent of the process gas mix and changes in the input gas flows. You can access the diagnostics via a Web browser, allowing you to monitor device functionality without removing the controller or breaking the process gas lines.
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