Compact Pressure Sensor from EPCOS
August 5, 2009
C32 Series pressure sensors from EPCOS Inc., Iselin, NJ, have measurement ranges from 1–40 bar with 0.3% F.S. typical nonlinearity and are 1.6 by 1.6 mm2. The chip-scale pressure sensors have high cyclic stability with drifts of 0.1% F.S. under temperature stress. Chips are equipped with optimized bond pads which have spatially offset test-pad structures for wafer probers. The miniaturized C32 sensors allow glass prepackaging at chip level on both the top and bottom of the chip; the reference volume for absolute pressure measurements is formed by an additional glass substrate on the top side of the chip. Applications include automotive, industrial, and medical electronics.
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