Process Industries

OMRON Adds New MEMS Flow Sensor

January 18, 2011

The D6F-70 MEMS flow sensor is optimized for gas flow rate measurement in fuel cell systems.

KYOTO, Japan--(BUSINESS WIRE) -- OMRON Corporation (TOKYO:6645)(ADR:OMRNY) announced plans to release the D6F-70, a 70L/min MEMS flow sensor optimized for measuring the gas flow rate of fuel cell systems. Omron also plans to release in FY2011 a similar MEMS flow sensor capable of measuring up to 200L/min.

These products will greatly enhance Omron's MEMS flow sensor lineup.

The D6F-70 MEMS Flow Sensor
This new product is capable of measuring up to 70L/min- an improvement of 20L/min from the current model- all with a very high level of accuracy thanks to Omron's unique MEMS technology.

Such sensors are needed to control the 70L/min flow rate of air as it reacts with hydrogen in home-use fuel cell systems. With this new addition to the lineup, Omron can now provide flow sensors suitable for use in all home-use fuel cell systems. The new sensor is also available with a standard P14-type quick connector that enables easier connection to fuel cell systems.

Higher flow rate types are increasingly necessary for industrial-use high power generation fuel cells. Omron's 200L/min type flow sensor scheduled for release in FY2011 will be able to meet the requirements of almost any type of fuel cell system. They will also enable wider usage in medical equipment applications, and are expected to also open the door to a wide range of other new applications.

Fuel cells and other such environmentally-friendly products are increasingly moving into the mainstream, and it is predicted that their use will become widespread globally in the near future. Our flow sensors improve the operational efficiency of fuel cells making them an even more attractive option for a wide range of applications.

   1. The detrimental effect of pump vibration has been reduced by 90% compared to existing models allowing a higher level of flow sensing accuracy.
   2. The D6F-70 70L/min flow sensor is almost the same size (84.6 × 32 × 30mm) as existing 50L/min sensors. This was made possible with a unique new flow structure.
   3. Easier connection: We have added sensors with P14-type quick connectors to the series. It is the standard connector type for fuel cell systems in Japan and significantly reduces the time required for pipe connection work.

Pricing: Open
Sales Target: 200,000 units for use in fuel cell systems in FY2013 Production Base: Omron Switch and Devices Corporation


Model number D6F-70AB71
Flow range 0 to 70 L/min
Medium Air
Power supply DC10.4 to 26.4V
Output DC1.0 to 5.0V
Size 84.6×32×30mm
Accuracy ±3%F.S. (at 25°C.)
Operating temperature –10°C to 60°C.
Operating humidity 35 to 85%RH (in ice-free, condensation-free conditions)
Connector P14-type quick connector

Headquartered in Kyoto, Japan, OMRON Corporation is a global leader in the field of automation. Established in 1933, and headed by President Hisao Sakuta, OMRON has more than 36,000 employees in over 35 countries working to provide products and services to customers in a variety of fields including industrial automation, electronic components industries, social systems and healthcare. The company is divided into five regions with head offices in Japan (Kyoto), Asia Pacific (Singapore), China (Shanghai), Europe (Amsterdam) and US (Chicago).

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