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Machine Manufacturing

Innovators Introduce Advanced Lithography Technology

February 14, 2012

Pixelligent and Brewer Science bring together their nanocrystal and microelectronic coating technologies to create a next-generation spin-on hardmask, which will improve semiconductor manufacturing functionality and improve etch selectivity.


BALTIMORE, MD /Marketwire/ -- Pixelligent Technologies and Brewer Science Inc. announced the development of a new spin-on hardmask technology. Pixelligent, an innovator in manufacturing nanocrystal additives for the electronics, industrial and military markets, and Brewer Science, a global technology leader in the microelectronics industry, have brought together their nanocrystal and microelectronic coating technologies to create a next generation spin-on hardmask for advanced lithography.

The hardmask incorporates Pixelligent's leading-edge nanocrystal and dispersion technologies with Brewer Science's industry-leading polymer technology. The result is a hardmask that dramatically improves the process window, while at the same time significantly reduces line collapse, improves etch selectivity, and offers broad resist compatibility. This product is the result of two years of intense collaboration between Pixelligent Technologies and Brewer Science, with significant support from NIST under an $8 million Technology Innovation Program award.

"We have worked very closely with Pixelligent over the past 2 years and have been impressed by their unique capability for producing 2–5 nm diameter, high-purity metal oxide nanocrystals that are stably dispersed in organic media. Their well-controlled manufacturing process reliably yields a narrow particle size distribution critical for the performance of our new spin-on hardmask product. We look forward to working with Pixelligent on other products enabled by their nanocrystal technology," commented Tony Flaim, CTO of Brewer Science.

"We are very proud that Brewer Science, one of the leading materials suppliers to the semiconductor industry, selected Pixelligent to be its partner. Brewer Science's reputation and successful track record of introducing innovative products in the semiconductor industry is second to none, and the company has been a great partner. I am confident that the semiconductor industry will quickly realize the tremendous value this next-generation hardmask offers," said Craig Bandes, President and CEO of Pixelligent Technologies.

Pixelligent is working with numerous technology leaders such as Brewer Science, as well as a number of Fortune 1000 companies, to develop market-leading products in the electronics, industrial, and military markets.

When commercialized, the new hardmask will be available in Brewer Science's OptiStack system of lithography solutions.

About Pixelligent Technologies
Pixelligent Technologies LLC is an innovator in manufacturing high-quality nanocrystal additives and polymer nanocomposites for the electronics, industrial, and military markets. "Pixelligent's proprietary methodology for delivering uniform dispersions is the best in the world." This is the key enabling technology required to deliver the highest performance in a wide-range of demanding and mission-critical applications. The company's Zirconia and Hafnia nanocrystals are used to magnify the optical, electronic, thermal, and mechanical properties of numerous polymer systems. Pixelligent develops applications with both leading-edge technology firms and Fortune 1000 companies.

About Brewer Science
Brewer Science Inc. is a global technology leader in creating, developing, and manufacturing specialty materials, equipment, and process solutions for applications in semiconductors, advanced packaging/3D ICs, MEMS, sensors, displays, LEDs, and printed electronics. The company's 30 years of in-depth knowledge and expertise in materials science, chemistry, physics, optics, modeling, and process integration distinguish it from all other material suppliers worldwide.