Apogee Technology Inc., Norwood, MA, offers the Sensilica family of MEMS-based piezoresistive pressure sensors. Housed in a TO-5 enclosure, sensors are available in 15, 45, 60, 100, 200, 300, 500, 750, and 1000 psia ranges, with high overpressure capability, <0.01% F.S. repeatability, and F.S. output (at 5 VDC excitation) from 65–125 mV, 100 mV typ. The 0.8 by 0.8 mm sensing element is a single-piece all-silicon design rather than the larger glass/silicon 2-piece design currently available. The pressure sensor is suited for a variety of industrial and commercial applications.
Apogee Technology Inc.