Electronics & Computers

ST Advances Through-Silicon Via Technology

October 13, 2011

The semiconductor provider has implemented TSV in high-volume MEMS sensor and actuator production, opening a path to reduced footprints and increased functionality in mobile phones and other gadgets.

GENEVA /PRNewswire/ -- STMicroelectronics, a global semiconductor leader, serving customers across the spectrum of electronics applications and a leading supplier of MEMS for consumer and portable applications, is the "world's first manufacturer to have implemented through-silicon via technology (TSV) in high-volume MEMS production. TSV replaces traditional wiring with short vertical interconnects in ST's multi-chip MEMS devices, such as smart sensors and multi-axis inertial modules, enabling a higher level of functional integration and performance in a smaller form factor.

TSV uses short vertical structures to connect multiple silicon dice stacked vertically in a single package, offering greater space efficiency and higher interconnect density compared with wire bonding or flip chip stacking. Already deployed in volume production, the ST-patented TSV technology helps shrink the MEMS chip size and increase its robustness and performance.

"There is a great demand for smaller packages in the consumer market. ST's breakthrough implementation of TSV in MEMS devices opens a path to reduced footprints and increased functionality in mobile phones and other gadgets," said Benedetto Vigna, Corporate Vice President and General Manager of ST's Analog, MEMS and Sensor Group. "High-performance 3D-chip integration in our smart sensors and multi-axis inertial modules marks another important milestone in our mission to make MEMS ubiquitous in all facets of life."

STMicroelectronics has a long history and expertise in high-volume production of MEMS sensors and actuators. Five years ago, ST launched the consumer MEMS revolution by making motion sensors small, accurate, and affordable through the combination of innovative product design, deep application expertise, and bold and timely infrastructure investments. More than 1.6 billion of ST's MEMS chips have been sold to date, addressing applications in consumer, computer, automotive, industrial, and medical segments.

About ST
STMicroelectronics is a global leader, serving customers across the spectrum of electronics applications with innovative semiconductor solutions. ST aims to be the undisputed leader in multimedia convergence and power applications, leveraging its vast array of technologies, design expertise, and combination of intellectual property portfolio, strategic partnerships, and manufacturing strength. In 2010, the company's net revenues were $10.35 billion.

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