Electronics & Computers

Brooks Launches New Capacitance Manometer

July 5, 2012

The XacTorr CMX family provides solar and semiconductor manufacturers with stable and repeatable measurements for pressure-sensitive processes.

HATFIELD, PA /PRNewswire/ -- Brooks Instrument will unveil its new XacTorr CMX0 capacitance manometer, as well as the new EtherCAT capabilities of its GF40/80 mass flow controller at Intersolar North America, July 10–12, in San Francisco. Brooks will showcase these and other mass flow, pressure, and vacuum products for the solar and semiconductor industries at Booth 5648.

The Brooks XacTorr CMX family of capacitance manometers provides solar and semiconductor manufacturers with highly stable and repeatable measurements for pressure sensitive processes. The product offers full-scale ranges from 1000 Torr to 100 mTorr, as well as 0.15% of reading accuracy. With its patented Mark IV sensor, the Brooks XacTorr lasts up to three times as long in aggressive processes compared with other capacitance manometers. The rapid recovery feature allows the sensor to recover from large changes in pressure faster than other vacuum gauges on the market, significantly decreasing downtime.

The XacTorr CMX0 offers users an unheated option, with the same full-scale ranges and an accuracy of 0.25% of reading. It also allows drop-in replacement and unique diagnostic features for preventative maintenance such as tracking remaining zero adjustment range to allow scheduled maintenance, which reduces unplanned interruptions. Additionally, XacTorr CMX0's digital communication protocol monitors and troubleshoots problems without interfering with the tool communication system.

The GF40/80 is a highly modular, user-programmable mass flow controller designed for solar and thin-film processes. Using MultiFlo technology, the GF40/80 combines exceptional flow repeatability, sub 1/sec flow control response time, the "most comprehensive gas and flow range programmability and industry leading long-term reliability."

The GF40/80 is now equipped with EtherCAT, a new communication protocol that has been adopted by leading-edge manufacturers in the solar and microelectronics industries. The EtherCAT protocol makes it easier to network flow control and other devices for advanced process control and diagnostic capabilities.

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